SS316L VIM-VAR MELTED Material is for ultrpurity applications.
Internally electro-polished finish with a surtace roughness of up to Ra 5 μin
Pressure from vacuumto 3500psig .
Flow coefficient, 1/4: Cv0.3, 1/2: Cv0.7, meets high flow requirements.
Body Material: SS316L, SS316L VAR,SS316L VIM-VAR
High standard cleanliness assembly and packaging suitable for the semiconductor industry that requires ultra-high purity.
Every product undergoes helium leak test
Provide Diaphragm spring made from Hastalloy C-22 and UNS R30003
Corrosion Resistance and high strensile
The fully enclosed valve seat design has the following advantages
Excellent anti-expansion and anti-pollution ability
Improved helium leak test performance Rarely produces particles ,long service life
Suitable assemble in the CVD ALD scenario