Features Body materiat: SS 316L, SS 316L VAR. The diaphragm valve core is constructed as a whole,making the switch more stable. Metal to metal diaphragm sealing. Internal electrolytic polishing, with a smoothness of up to Ra 5 uin. The internal volume is small. Vacuum to 3000 psig (206 bar) inlet. Flow c0efficient Cv: 0.9(HF=1.1,FC=0.65). Maximum flow rate, SF:800 SLPM, HF:1000 SLPM, FC:1500SLPM. High cleanliness assembly and packaging are suitable for thethe high-purity semiconductor industry. Every product undergoes helium testing before leaving the factory.